A flexible RF filter successfully developed by an innovative process called FlexMEMS

Flexible electronics is an important development direction in the future of electronics. At present, scientists have developed some flexible materials with better electronic performance, such as transistor arrays that can be folded and stretched arbitrarily, flexible screens that can be bent, and various types of clothing Sensors and electronic skins. However, in order for flexible electronic devices to realize their enormous potential, they must also have a "hard skill", that is, radio frequency communication capabilities. Only with this function, the "flexible" mobile phones that everyone expects can become a reality.

At present, the scientific research team of the State Key Laboratory of Precision Testing Technology and Instruments of Tianjin University, the School of Precision Instruments and Optoelectronic Engineering, and the Nanchang Institute of Microtechnology of Tianjin University has made breakthrough progress in this direction. "Film Bulk Acoustic Wave Filters toward Radiofrequency Wireless Communication" was published in the international authoritative journal "SMALL" on May 17 and was selected as the cover article for key recommendation.

The mobile phone is an electronic device that integrates wireless radio frequency communication technology, and can realize the high-speed data transmission quietly. In today's smart phone era, not only can the collection of many sensor signals and the transmission of control signals, and the interaction of information flows between devices, but also can be applied to the Internet of Things and the mass node data transmission of big data. However, such a "powerful" mobile phone is still hard and inflexible, because it is still a research problem to provide flexible electronic devices with high-speed wireless communication capabilities.

Tianda's scientific research team pioneered the flexible RF filter technology, and successfully developed a flexible RF filter using an innovative process called FlexMEMS (Flexible Micro Electro Mechanical System), which can be directly applied to the wireless RF communication of flexible electronics in the future. The research results were completed by doctoral student Jiang Yuan under the guidance of Professor Pang Wei and Assistant Professor Zhang Menglun.

The radio frequency filter is an indispensable core basic component in the radio frequency communication module. The function of the radio frequency communication module is to receive, transmit and finely process (filter, amplify, modulate and demodulate, digital-to-analog conversion, etc.) data and information. The radio frequency filter can avoid mutual interference between radio frequency electromagnetic wave signals of different sources and different uses , To screen the electromagnetic wave signal of specific target.

"Some of the electrical performance indicators of the flexible RF filters we have developed have reached the level of commercial RF filters in current smart phones." Jiang Yuan said.

The FlexMEMS process technology pioneered by the team can manufacture micro-electromechanical devices with high-precision movable microstructures on ultra-thin plastic substrates, solving the problem of rough surface and high temperature-resistant polymer material substrates and high-quality thin films, high-precision movable micro Incompatibilities of structure in device design, manufacturing and packaging.

In addition, this technology is not limited to the manufacture of flexible RF filters, but can also be applied to the manufacture of a variety of flexible micro-electromechanical devices, such as pressure gauges, accelerometers, gyroscopes, ultrasound recognition and imaging units, projection imaging units, microphones, etc. Flexible electronic devices have a stronger ability to perceive the external world (such as virtual reality) and even affect the external world (such as augmented reality).

"Next, we plan to develop a flexible electronic system with complete wireless radio frequency communication functions based on the existing flexible radio frequency filtering technology. Not only the mobile phone can be" flexible "and bendable, so that flexible electronic equipment has" communication " (Refers to wireless communication), "thinking" (referring to computing), "memory" (referring to storage) functions, and even the ability to "perceive" (refer to sensing) and "transform" (referring to display, imaging, etc.) the world is just around the corner. " Pang Wei thinks.

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